Thickness/Thickness STD
4.5 ± 0.5 μm / < 3%
Orientation Flat of GaN
(1-100) 0 ± 0.2 °, 30 ± 1 mm
*XRD FWHMs
(0002) < 300 arcsec,(10-12) < 400 arcsec
Orientation of Sapphire
C plane (0001) off angle toward M-axis 0.2 ± 0.1 °
Orientation Flat of Sapphire
(11-20) 0 ± 0.2 °, 30 ± 1 mm
Sapphire Polish
Single side polished (SSP) / Double side polished (DSP)
Useable Area
> 90% (edge and macro defects exclusion)